Measurement Technology for Opaque Multilayer Film Thickness by Photothermal Effect (2nd Report)
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چکیده
منابع مشابه
Advanced Multilayer Amorphous Silicon Thin-Film Transistor Structure: Film Thickness Effect on Its Electrical Performance and Contact Resistance
We report the intrinsic and extrinsic electrical characteristics of advanced multilayer amorphous silicon (a-Si:H) thin-film transistor (TFT) with dual amorphous silicon nitride (a-SiNX:H) and a-Si:H layers. The thickness effect of the high electronic quality a-Si:H film on the transistor’s electrical property was investigated; with increasing film thickness, both field-effect mobility and subt...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 2007
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.73.134